PECVD is actually a modification to the CVD system, where the plasma is used to boost the decomposition with the reactive fuel resource. In this method, various styles of ions and radicals formed from chemical reactions from the plasma (mainly electron effect ionization and dissociation) diffuse towards the substrate where https://www.quora.com/profile/Trevor-Flatcher-2/Advantages-of-Silicon-Carbide-Materials-in-High-Temperature-Electronic-Devices-Silicon-carbide-SiC-has-emerged-as-a-c