CMP, also referred to as thermal oxidation sprucing, utilizes MP along with chemical compounds to enhance the MRR and enhance surface top quality [20]. Figure 2 illustrates the schematic of a typical CMP process [21]. The SiC wafer, that's fastened to the provider, and also the polishing pad move relative https://www.quora.com/profile/Trevor-Flatcher-2/Role-of-Silicon-Carbide-in-Fuel-Cells-Silicon-carbide-SiC-plays-a-crucial-role-in-advancing-fuel-cell-technology-off